Influence of O2/Ar ratio on the structural, electrical, and optical properties of transparent conductive zirconium-doped ZnO films prepared by radiofrequency sputtering

Scripta Materialia

Volumn 61, Issue 3, 2009, Pages 231-233

  Cao, Feng ^a   Wang, Yiding ^a   Li, Lei ^a   Guo, Baojia ^a   An, Yupeng ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Electrical properties; Semiconductors; Sputtering; Thin films; Transparent conductive oxides

Indexed keywords

DOPED-ZNO; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL PROPERTIES; GLASS SUBSTRATES; HALL MEASUREMENTS; OPTICAL TRANSMISSION SPECTROSCOPIES; OPTICAL TRANSMITTANCES; POLY-CRYSTALLINE; RADIO-FREQUENCY SPUTTERING; SEMICONDUCTORS; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE FILMS; TRANSPARENT CONDUCTIVE OXIDES; X- RAY DIFFRACTIONS;

ARGON; CONDUCTIVE FILMS; CRYSTALS; ELECTRIC CONDUCTIVITY; OPTICAL PROPERTIES; SEMICONDUCTING ZINC COMPOUNDS; THIN FILMS; ZINC OXIDE; ZIRCONIUM;

OPTICAL FILMS;

EID: 65549096894     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2009.03.036     Document Type: Article

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