Low-temperature deposition of transparent conducting ZnO:Zr films on PET substrates by DC magnetron sputtering

Applied Surface Science

Volumn 255, Issue 11, 2009, Pages 6054-6056

  Zhang, Huafu ^a   Lei, Chengxin ^a   Liu, Hanfa ^a   Yuan, Changkun ^a  

^a SHANDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

DC magnetron sputtering; Polyethylene terephthalate; Thin films; Zirconium doped zinc oxide

Indexed keywords

II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; OXIDE FILMS; PLASTIC BOTTLES; POLYETHYLENE TEREPHTHALATES; TEMPERATURE; THIN FILMS; ZINC OXIDE; ZIRCONIUM COMPOUNDS;

DC MAGNETRON SPUTTERING; DEPOSITION PRESSURES; HIGH TRANSMITTANCE; LOW-TEMPERATURE DEPOSITION; OPTIMUM DEPOSITION; POLYETHYLENE TEREPHTHALATES (PET); WAVELENGTH RANGES; ZIRCONIUM-DOPED ZINC OXIDES;

CONDUCTIVE FILMS;

EID: 60949085080     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.01.043     Document Type: Article

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