Geometric effects on dislocation nucleation in strained electronics

Applied Physics Letters

Volumn 94, Issue 17, 2009, Pages

  Li, T L ^a   Lee, J H ^a   Gao, Y F ^a,b   Pharr, G M ^a,b   Huang, M ^c   Tsui, T Y ^d  

^a University of Tennessee Knoxville   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c GE GLOBAL RESEARCH   (United States)

^d UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COHESIVE INTERFACES; DISLOCATION CORES; DISLOCATION LOOPS; DISLOCATION NUCLEATIONS; EXTERNAL STRESS; GEOMETRIC EFFECTS; GEOMETRIC PARAMETERS; HEIGHT RATIOS; NANO-ELECTRONIC DEVICES; SHARP GEOMETRIC FEATURES; SI SUBSTRATES; THREE-DIMENSIONAL SHAPES;

THREE DIMENSIONAL;

NUCLEATION;

EID: 65449189785     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3126520     Document Type: Article

References (31)

1. S. M. Hu, J. Appl. Phys. 0021-8979 70, R53 (1991). 10.1063/1.349282
2. L. B. Freund and S. Suresh, Thin Film Materials (Cambridge University Press, New York, 2004).
3. M. L. Lee, E. A. Fitzgerald, M. T. Bulsara, M. T. Currie, and A. Lochtefeld, J. Appl. Phys. 0021-8979 97, 011101 (2005). 10.1063/1.1819976
4. C. E. Murray, K. L. Saenger, O. Kalenci, S. M. Polvino, I. C. Noyan, B. Lai, and Z. Cai, J. Appl. Phys. 0021-8979 104, 013530 (2008). 10.1063/1.2952044
5. M. Kammler, D. Chidambarrao, K. W. Schwarz, C. T. Black, and F. M. Ross, Appl. Phys. Lett. 0003-6951 87, 133116 (2005). 10.1063/1.2061862
6. Z. Zhang, J. Yoon, and Z. Suo, Appl. Phys. Lett. 0003-6951 89, 261912 (2006). 10.1063/1.2424665
7. M. Feron, Z. Zhang, and Z. Suo, J. Appl. Phys. 0021-8979 102, 023502 (2007). 10.1063/1.2753674
8. C. R. Olson, E. Kuryliw, B. E. Jones, and K. S. Jones, J. Vac. Sci. Technol. B 1071-1023 24, 446 (2006). 10.1116/1.2162566
9. N. G. Rudawski, K. N. Siebein, and K. S. Jones, Appl. Phys. Lett. 0003-6951 89, 082107 (2006). 10.1063/1.2337994
10. Y. G. Shin, J. Y. Lee, M. H. Park, and H. K. Kang, J. Cryst. Growth 0022-0248 233, 673 (2001). 10.1016/S0022-0248(01)01630-X
11. N. G. Rudawski, K. S. Jones, and R. Gwilliam, Appl. Phys. Lett. 0003-6951 91, 172103 (2007). 10.1063/1.2801518
12. N. G. Rudawski, K. S. Jones, and R. G. Elliman, J. Vac. Sci. Technol. B 1071-1023 26, 435 (2008). 10.1116/1.2775459
13. N. G. Rudawski, K. S. Jones, and R. Gwilliam, Mater. Sci. Eng. R. 0927-796X 61, 40 (2008). 10.1016/j.mser.2008.02.002
14. N. G. Rudawski, K. S. Jones, S. Morarka, M. E. Law, and R. G. Elliaman, J. Appl. Phys. (unpublished).
15. Y. F. Gao, H. T. Xu, W. C. Oliver, and G. M. Pharr, J. Mech. Phys. Solids 0022-5096 56, 402 (2008). 10.1016/j.jmps.2007.05.015
16. B. Lawn, Fracture of Brittle Solids, 2nd ed. (Cambridge University Press, New York, 1993).
17. J. R. Rice and R. Thomson, Philos. Mag. 29, 73 (1974). 10.1080/14786437408213555
18. H. H. Yu, P. Shrotriya, Y. F. Gao, and K. -S. Kim, J. Mech. Phys. Solids 0022-5096 55, 489 (2007). 10.1016/j.jmps.2006.09.003
19. Y. F. Gao, H. H. Yu, and K. -S. Kim, J. Mech. Phys. Solids 0022-5096 56, 2759 (2008). 10.1016/j.jmps.2008.05.003
20. Y. F. Gao and J. Lou, J. Nanomater. 2008, 380961.
21. J. P. Hirth and J. Lothe, Theory of Dislocations, 2nd ed. (Krieger Publishing Company, Malabar, FL, 1992).
22. J. R. Rice, J. Mech. Phys. Solids 0022-5096 40, 239 (1992). 10.1016/S0022-5096(05)80012-2
23. Y. F. Gao and A. F. Bower, Modell. Simul. Mater. Sci. Eng. 0965-0393 12, 453 (2004). 10.1088/0965-0393/12/3/007
24. S. M. Xia, Y. F. Gao, A. F. Bower, L. C. Lev, and Y. T. Cheng, Int. J. Solids Struct. 0020-7683 44, 3685 (2007). 10.1016/j.ijsolstr.2006.10.009
25. K. E. Johanns, J. H. Lee, Y. F. Gao, and G. M. Pharr (unpublished).
26. H. Bei, Y. F. Gao, S. Shim, E. P. George, and G. M. Pharr, Phys. Rev. B 0163-1829 77, 060103 (2008). 10.1103/PhysRevB.77.060103
27. J. J. Wortman and R. A. Evans, J. Appl. Phys. 0021-8979 36, 153 (1965). 10.1063/1.1713863
28. S. Ogata, J. Li, N. Hirosaki, Y. Shibutani, and S. Yip, Phys. Rev. B 0163-1829 70, 104104 (2004). 10.1103/PhysRevB.70.104104
29. G. Bao and Z. Suo, Appl. Mech. Rev. 0003-6900 45, 355 (1992).
30. Y. F. Gao, B. N. Lucas, J. C. Hay, W. C. Oliver, and G. M. Pharr, Scr. Mater. 1359-6462 55, 653 (2006). 10.1016/j.scriptamat.2006.05.006
31. Y. F. Gao, H. T. Xu, W. C. Oliver, and G. M. Pharr, J. Appl. Mech. 0021-8936 75, 034504 (2008). 10.1115/1.2871022