Split singularities and dislocation injection in strained silicon

Journal of Applied Physics

Volumn 102, Issue 2, 2007, Pages

  Feron, Martijn ^a,b   Zhang, Zhen ^a   Suo, Zhigang ^a  

^a HARVARD UNIVERSITY   (United States)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); MICROELECTRONICS; RESIDUAL STRESSES; STRAIN; THIN FILMS;

LINEAR SUPERPOSITION; SLIP SYSTEMS; SPLIT SINGULARITIES; STRAIN FIELDS;

SILICON;

EID: 34547558616     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2753674     Document Type: Article

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