Fabrication of monolithic bridge structures by vacuum-assisted capillary-force lithography

Small

Volumn 5, Issue 7, 2009, Pages 790-794

  Kwak, Rhokyun ^a   Jeong, Hoon Eui ^a   Suh, Kahp Y ^a  

^a Seoul National University   (South Korea)

Author keywords

Bridge structures; Capillarity; Curing; Lithography

Indexed keywords

ACCELERATION VOLTAGES; AIR PRESSURES; BASE STRUCTURES; BRIDGE STRUCTURES; CAPILLARY ACTIONS; FORCE LITHOGRAPHIES; HIGH ENERGIES; HIGH RESOLUTIONS; LOW VACUUMS; MERCURY LAMPS; MICRO-PATTERNED; NANO-CHANNELS; NANO-SCALE; PDMS MOLDS; SEM; SEM IMAGES; UNCURED RESINS; UV RADIATIONS; UV-CURABLE;

ATMOSPHERIC PRESSURE; CAPILLARITY; CURING; MERCURY (METAL); MOLDS; RESINS; SILICONES; ULTRAVIOLET RADIATION; VACUUM;

LITHOGRAPHY;

ARTICLE; ELECTRONICS; VACUUM;

MINIATURIZATION; VACUUM;

EID: 65449182048     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200900219     Document Type: Article

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