On the processing conditions and interfacial chemistry of composite PZT thick films on platinised silicon substrates

Sensors and Actuators, A: Physical

Volumn 151, Issue 2, 2009, Pages 203-212

  Haigh, R D ^a   Whatmore, R W ^b  

^a OPEN UNIVERSITY   (United Kingdom)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Actuator; Piezoelectric; Planar; PZT; Thick Film

Indexed keywords

BARRIER LAYERS; COMPLEX GEOMETRIES; ELECTRODE INTERFACES; FILM DELAMINATIONS; HIGH OXYGEN PARTIAL PRESSURES; INTERFACIAL CHEMISTRIES; OXYGEN DIFFUSIONS; PIEZOELECTRIC; PLANAR; PROCESSING CONDITIONS; PZT; PZT THICK FILMS; RE OXIDATIONS; SILICON SUBSTRATES; SPIRAL SHAPES; STABILISATION; THICK-FILM MATERIALS;

COMPOSITE FILMS; ELECTROCHEMICAL ELECTRODES; OXYGEN; PARTIAL PRESSURE; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PLATINUM; SEMICONDUCTING LEAD COMPOUNDS; SINTERING; SOLS; STEEL SHEET; SUBSTRATES; THICK FILMS;

PIEZOELECTRIC ACTUATORS;

EID: 64549135754     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.02.037     Document Type: Article

References (24)

1. D.A. Barrow, T.E. Petroff, M. Sayer, Method for Producing Thick Ceramic Films by a Sol-Gel Coating Process, United States Patent No. 5,585,136, United States of America, 1996.
2. Corker D.L., Whatmore R.W., Ringgaard E., and Wolny W.W. Liquid phase sintering of PZT ceramics. Journal of the European Ceramic Society 20 (2000) 2039-2045
3. R.D. Haigh, Ferroelectric thick films prepared by chemical solution deposition of sol-gel composite slurries, M.Sc. Thesis, Cranfield University, 2001.
4. 3 thin films by sol-gel casting. Japanese Journal of Applied Physics Part 1-Regular Papers, Short Notes and Review Papers 39 (2000) 5429-5433
5. Xia D., Liu M., Zeng Y., Li C., and Fabrication. Electrical properties of lead zirconate titanate thick films by the new sol-gel method. Materials Science and Engineering B87 (2001) 160-163
6. Zhao C., Wang Z., Zhu W., Tan O., and Hng H. Microstructure and properties of PZT53/47 thick films derived from sols with submicron-sized PZT particle. Ceramics International 30 (2004) 1925-1927
7. Kholkin A.L., Yarmarkin V.K., Wu A., Avdeev M., Vilarinho P.M., and Baptista J.L. PZT-based piezoelectric composites via a modified sol-gel route. Journal of the European Ceramic Society 21 (2001) 1535-1538
8. Dorey R.A., and Whatmore R.W. Electroceramic thick film fabrication for MEMS. Journal of Electroceramics 12 (2004) 19-32
9. Duval F.F.C., Dorey R.A., Haigh R.D., and Whatmore R.W. Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures. Thin Solid Films 444 (2003) 235-240
10. Wilson S.A., Haigh R.D., Southin J.E.A., Dorey R.A., and Whatmore R.W. Design of Spiral piezoelectric cantilever unimorphs for microactuation. Proceedings of the Euspen International Topical Conference. Aachen, Germany (2003)
11. R.D. Haigh, Novel piezoelectric thick film actuators, Ph.D. Thesis, Cranfield University, 2006.
12. Wang Z., Zhu W., Zhu H., Miao J., Chao C., Zhao C., and Tan O.K. Fabrication and characterisation of piezoelectric micromachined ultrasonic transducers with thick composite PZT films. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 52 (2005) 2289-2297
13. Zhu H., Miao J., Wang Z., Zhao C., and Zhu W. Fabrication of ultrasonic arrays with 7 μm PZT thick films as ultrasonnic emitter for object detection in air. Sensors and Actuators, A: Physical 123-124 (2005) 614-619
14. Wang Q.-M., and Eric Cross L. Analysis of high temperature reduction processing of RAINBOW actuator. Materials Chemistry and Physics 58 (1999) 20-25
15. Brooks K.G., Reaney I.M., Klissurska R.D., Huang Y., Bursill L., and Setter N. Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates. Journal of Materials Research 9 (1994) 2540-2553
16. Beeby S.P., Blackburn A., and White N.M. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems. Journal of Micromechanics and Microengineering 9 (1999) 218-229
17. Glynne-Jones P., Beeby S.P., Dargie P., Papakostas T., and White N.M. An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon. Measurement Science and Technology 11 (2000) 526-531
18. Wang Z., Miao J., and Zhu W. Piezoelectric thick films and their application in MEMS. Journal of the European Ceramic Society 27 (2007) 3759-3764
19. Corker D.L., Zhang Q., Whatmore R.W., and Perin C. PZT 'composite' ferroelectric thick films. Journal of the European Ceramic Society 22 (2002) 383-390
20. Dorey R., Haigh R.D., Stringfellow S.B., and Whatmore R.W. Effect of Sol infiltrations on the electrical properties of PZT. Proceedings of Ferroelectrics UK. Sheffield University, UK (2001)
21. 7-x films. Journal of Applied Physics Letters 61 (1992) 1240-1242
22. Trolier S.E., Xu C., and Newnham R.E. A modified thickness extensional disk transducer. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 35 (1988) 839-842
23. 4 membrane by a chemical wet etching approach. Journal of Material Science Letters 19 (2000) 2263-2265
24. Miller R.A., and Bernstein J.J. A novel wet etch for patterning lead zirconate-titanate (PZT) thin films. Integrated Ferroelectrics 29 (2000) 225-231