An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon

Measurement Science and Technology

Volumn 11, Issue 5, 2000, Pages 526-531

  Glynne Jones, P ^a   Beeby, S P ^a   Dargie, P ^a   Papakostas, T ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Hybrid microelectronics; Piezoelectric constants; Static; Thick film sensors

Indexed keywords

ACTUATORS; FIRING (OF MATERIALS); HIGH TEMPERATURE PROPERTIES; LEAD COMPOUNDS; MICROELECTRONICS; MICROSENSORS; PIEZOELECTRICITY; SILICON; SINTERING; THICK FILMS;

HYBRID MICROELECTRONICS; LEAD ZIRCONATE TITANATE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033700529     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/5/312     Document Type: Article

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