Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

Thin Solid Films

Volumn 444, Issue 1-2, 2003, Pages 235-240

  Duval, F F C ^a   Dorey, R A ^a   Haigh, R H ^a   Whatmore, R W ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Interface; Platinum; PZT; Silicon

Indexed keywords

ANNEALING; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; OXIDATION; TITANIUM DIOXIDE;

ELECTRODE STRUCTURES;

THICK FILMS;

EID: 0142075177     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01129-5     Document Type: Article

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