Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS

Sensors and Actuators, A: Physical

Volumn 151, Issue 2, 2009, Pages 95-99

  Schneider, Florian ^a   Draheim, Jan ^a   Kamberger, Robert ^a   Wallrabe, Ulrike ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Modulus of elasticity; Optical absorption; PDMS; Refractive index

Indexed keywords

DAMPING COEFFICIENTS; DOW CORNING; MATERIAL PROPERTIES; MICRO-ELECTRO MECHANICAL SYSTEMS; MODULUS OF ELASTICITY; OPTICAL ABSORPTION; OPTICAL CHARACTERIZATIONS; OPTICAL DISPERSIONS; OPTICAL MEMS; PDMS; POLYDIMETHYLSILOXANE PDMS; RHEOLOGICAL PARAMETERS; TWO PRODUCTS;

ABSORPTION; COMPOSITE MICROMECHANICS; ELASTIC MODULI; ELASTICITY; ELECTROMECHANICAL DEVICES; LIGHT ABSORPTION; LIGHT REFRACTION; MECHANICAL PROPERTIES; MEMS; MICROCHANNELS; REFRACTIVE INDEX; REFRACTOMETERS; RHEOLOGY; STRAIN;

SILICONES;

EID: 64549087969     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.01.026     Document Type: Article

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