Analysis of elastic micro optical components under large deformation

Journal of Micromechanics and Microengineering

Volumn 13, Issue 1, 2003, Pages 149-154

  Hoshino, Kazunori ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIREFRINGENCE; FINITE ELEMENT METHOD; RAY TRACING;

MICRO VISUAL SYSTEMS;

MICROLENSES;

EID: 0037231284     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/1/321     Document Type: Article

References (10)

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