A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 584-593

  Logeeswaran, V J ^a   Tay, Francis E H ^a   Chan, M L ^a   Chau, F S ^a   Liang, Y C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electrostatic drive; First harmonic (2f); Lock in; Lorentzian curve fitting; Resonance Curve Area (RCA)

Indexed keywords

BANDWIDTH; CHIP SCALE PACKAGES; CROSSTALK; ELECTROSTATICS; HARMONIC ANALYSIS; NATURAL FREQUENCIES; NYQUIST DIAGRAMS; Q FACTOR MEASUREMENT; RESONATORS; SIGNAL TO NOISE RATIO;

MICROMECHANICAL TRANSDUCERS;

TRANSDUCERS;

EID: 6444245009     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462859     Document Type: Conference Paper

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