Thick macroporous membranes made of p-type silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1402-1406

  Zheng, J ^a   Christophersen, M ^b   Bergstrom, P L ^a  

^a Michigan Technological University   (United States)

^b UNIVERSITY OF ROCHESTER MEDICAL CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MACROPOROUS MEMBRANES; OPTICAL ETCH CONDITIONS; UNIFORM MEMBRANE FORMATION;

ETCHING; GROWTH (MATERIALS); PORE SIZE;

POROUS SILICON;

EID: 25444525159     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461113     Document Type: Conference Paper

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