B activation and clustering in ion-implanted Ge

Journal of Applied Physics

Volumn 105, Issue 6, 2009, Pages

  Impellizzeri, G ^a   Mirabella, S ^a   Bruno, E ^a   Piro, A M ^a   Grimaldi, M G ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS POCKETS; B CLUSTERING; CHANNELING MEASUREMENTS; CRYSTALLINE GE; DOPED SAMPLES; ELECTRICAL ACTIVATIONS; EXPERIMENTAL STUDIES; FUTURE GENERATIONS; PHYSICAL MECHANISMS; THERMAL BUDGETS; THERMAL STABILITIES; ULTRA SHALLOW JUNCTIONS;

BINDING ENERGY; DOPING (ADDITIVES); GERMANIUM; STOICHIOMETRY; THERMODYNAMIC STABILITY;

ELECTRIC NETWORK ANALYSIS;

EID: 63749129470     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3091289     Document Type: Article

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