Ni cantilever fabrication by transfer process without sacrificial layer

Sensors and Materials

Volumn 16, Issue 4, 2004, Pages 211-222

  Kawata, Hiroaki ^a   Yasuda, Masaaki ^a   Hirai, Yoshihiko ^a  

^a Osaka City University   (Japan)

Author keywords

Atmospheric pressure press; Epoxy resin; Ni cantilever; No sacrificial layer; Transfer process

Indexed keywords

EID: 6344231919     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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