Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer

IEEJ Transactions on Sensors and Micromachines

Volumn 124, Issue 3, 2004, Pages 69-74

  Kawata, Hiroaki ^a   Yasuda, Masaaki ^a  

^a Osaka Metropolitan University   (Japan)

Author keywords

image reversal resist; sticking; surface micromachine

Indexed keywords

EID: 6344269217     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.124.69     Document Type: Article

References (8)

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