Growth and thermal stability of SiGe/Si superlattices on bulk Si wafers

ECS Transactions

Volumn 16, Issue 10, 2009, Pages 341-351

  Hartmann, J M ^a   Papon, A M ^a   Colonna, J P ^a   Ernst, T ^a   Billon, T ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; GERMANIUM COMPOUNDS; GERMANIUM METALLOGRAPHY; GROWTH KINETICS; SI-GE ALLOYS; SILICA; SILICON WAFERS; THERMODYNAMIC STABILITY;

HARD MASKS; P-DOPING; SI (001) SUBSTRATE; SI WAFER; SI(0 0 1); SI0.8GE0.2; SIGE/SI;

NITROGEN COMPOUNDS;

EID: 63149177119     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2986792     Document Type: Conference Paper

References (22)

1. S. Borel et al., ECS Trans. Vol. 3, no. 7, 627 (2006).
2. T.Yamazakietal., Mater. Res. Soc.Proc. 795, Ul 1.8 (2004).
3. th ECS Meeting (Los-Angeles (USA) 2005).
4. Y. Bogumilowicz, J.M. Hartmann, J.M. Fabbri and T. Billon, Semicond. Sci. Technol. 21, 1668(2006).
5. D. Dutartre et al., Proceedings of the 2007 IEDM Conference, p. 689.
6. S. Harrison et al., Proceedings of the 2003 IEDM Conference, p. 449.
7. S. Monfray et al., Proceedings of the 2004 IEDM Conference, p. 635.
8. S. Monfray et al., Proceedings of the 2007 IEDM Conference, p. 693.
9. T. Ernst et al., Proceedings of the 2006 IEDM Conference, p. 1.
10. C. Dupré, T. Ernst, V. Maffini-Alvaro, V. Delaye, J.M. Hartmann, S. Borel, C. Vizioz, O. Faynot, G. Ghibaudo and S. Deleonibus, Sol. State Electron. 52, 519 (2008).
11. E Bernard et al., Proceedings of the 2007 ESSDERC Conference, p. 147.
12. E. Bernard et al., Proceedings of the 2008 Symposium on VLSI Technology, p. 16.
13. J.M. Hartmann, P. Holliger, F. Laugier, G. Rolland, A. Suhm, T. Ernst, T. Billon and N. Vullist, J. Cryst. Growth 283, 57 (2005).
14. E. Dornel, T. Ernst, J. C. Barbé, J. M. Hartmann, V. Delaye, F. Aussenac, C. Vizioz, S. Borel, V. Maffini-Alvaro, C. Isheden and J. Foucher, Appl. Phys. Lett. 91, 233502 (2007).
15. A. Hubert et al., ECS Trans. 13, no. 1, 195 (2008).
16. V. Holy, U. Pietsch and T. Baumbach, High Resolution X-Ray Scattering from Thin Films and Multilayers, Springer Tracts in Modern Physics 149, Springer-Verlag Berlin - Heidelberg - New-York, 1999.
17. Y. Bogumilowicz, J.M. Hartmann, F. Laugier, G. Rolland, T. Billon, N. Cherkashin and A. Claverie, J. Cryst. Growth 283, 346 (2005).
18. J.W. Matthews and A.E. Blakeslee, J. Cryst. Growth 27, 118 (1974).
19. V. Loup, J.M. Hartmann, G. Rolland, P. Holliger, F. Laugier and M.N. Séméria, J. Vac. Sci. Technol. B 21, 246 (2003).
20. J.M. Hartmann, L. Clavelier, C. Jahan, P. Holliger, G. Rolland, T. Billon and C. Defranoux, J Cryst. Growth 264, 36 (2004).
21. J.M. Hartmann, F. Gonzatti, F. Fillot and T. Billon, J. Cryst. Growth 310, 62 (2008).
22. S. Chopra, M.C. Ozturk, V. Misra, K. McGuire and L.E. McNeil, Appl. Phys. Lett. 88, 202114(2006).