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Volumn 88, Issue 20, 2006, Pages

Analysis of boron strain compensation in silicon-germanium alloys by Raman spectroscopy

Author keywords

[No Author keywords available]

Indexed keywords

BIAXIAL COMPRESSIVE STRAIN; BORON DOPING; STRAIN COMPENSATION; STRAIN ENERGY;

EID: 33646892478     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2205752     Document Type: Article
Times cited : (35)

References (14)
  • 2
    • 0029543599 scopus 로고    scopus 로고
    • A. Amour, C. Liu, J. Sturm, Y. Lacroix, and M. Thewalt, Appl. Phys. Lett. 67, 3915 (1995), http://dx.doi.org/10.1063/1.115316.
  • 10
    • 0003644756 scopus 로고    scopus 로고
    • edited by E.Kasper and K.Lyutovich (INSPEC, IEE, London
    • Properties of Silicon Germanium and SiGe: Carbon, edited by, E. Kasper, and, K. Lyutovich, (INSPEC, IEE, London, 2000).
    • (2000) Properties of Silicon Germanium and SiGe: Carbon
  • 11
    • 0003397937 scopus 로고    scopus 로고
    • edited by W.Liu and M.Santos (World Scientific, Singapore
    • Thin Films: Heteroepitaxial Systems, edited by, W. Liu, and, M. Santos, (World Scientific, Singapore, 1999), Vol. 15.
    • (1999) Thin Films: Heteroepitaxial Systems , vol.15


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.