Mapping strains at the nanoscale using electron back scatter diffraction

Superlattices and Microstructures

Volumn 45, Issue 4-5, 2009, Pages 285-294

  Wilkinson, Angus J ^a   Meaden, Graham ^b   Dingley, David J ^c  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b BLG Productions   (United Kingdom)

^c UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

EBSD; Mesa; SiGe; Strain; Stress

Indexed keywords

BACKSCATTERING; CRYSTAL LATTICES; DIFFRACTION; NANOTECHNOLOGY; SI-GE ALLOYS; STRESSES;

CROSS-CORRELATION MEASUREMENTS; CRYSTALLINE SAMPLES; EBSD; ELECTRON BACK SCATTER DIFFRACTION; MESA; SIGE; THICK EPITAXIAL LAYERS; TWO-DIMENSIONAL MAP;

STRAIN;

EID: 63149099751     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2008.10.046     Document Type: Article

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