A micro X-ray fluorescence analysis method using polycapillary X-ray optics and grazing exit geometry

Thin Solid Films

Volumn 517, Issue 11, 2009, Pages 3357-3361

  Yang, Jun ^a   Tsuji, Kouichi ^b   Lin, Xiaoyan ^a   Han, Dongyan ^a   Ding, Xunliang ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

^b Osaka Prefecture University   (Japan)

Author keywords

Film analysis; Grazing exit X ray fluorescence (GE XRF); Polycapillary X ray lens

Indexed keywords

DIFFRACTOMETERS; ELECTROMAGNETIC WAVE REFLECTION; FLUORESCENCE; ION SOURCES; METAL ANALYSIS; OPTICAL INSTRUMENT LENSES; SINGLE CRYSTALS; TITANIUM; TWO DIMENSIONAL; VACUUM APPLICATIONS; VAPORS; X RAY APPARATUS; X RAYS;

EXPERIMENTAL DATUM; FILM ANALYSIS; GAAS; GRAZING EXIT X-RAY FLUORESCENCE (GE-XRF); IRON LAYERS; LAYER CHARACTERIZATIONS; LAYER DEPOSITIONS; LAYER UNIFORMITIES; METAL VAPOR VACUUM ARCS; MICRO ANALYSIS; MICRO-X-RAY FLUORESCENCES; MODEL CALCULATIONS; POLYCAPILLARY X-RAY LENS; POLYCAPILLARY X-RAY OPTICS; THIN LAYERS; TOTAL REFLECTIONS; TWO-DIMENSIONAL SCANS;

X RAY ANALYSIS;

EID: 62849090507     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.12.004     Document Type: Article

References (23)

1. Noma T., and Iida A. Rev. Sci. Instrum. 65 (1994) 837
2. Claes M., de Bokx P., and Van Grieken R. X-Ray Spectrom. 28 (1999) 224
3. de Boer D.K.G. Phys. Rev., B 44 (1991) 498
4. Kregsamer P., Streli C., Wobrauschek P., Gatterbauer H., Pianetta P., Palmetshofer L., and Brehm L.L. X-Ray Spectrom. 28 (1999) 292
5. Wiener G., Kidd S.J., Mutsaers C.A.H., Wolters R.A.M., and de Bokx P.K. Appl. Surf. Sci. 125 (1998) 129
6. Urbach H.P., and de Bokx P.K. Phys. Rev., B 53 (1996) 3752
7. Tsuji K., Takenaka H., Wagatsum K., de Bokx P.K., and Van Grieken R.E. Spectrochim. Acta, Part B 54 (1999) 1881
8. Andermann G. Appl. Surf. Sci. 31 (1988) 1
9. de Bokx P.K., Kok Chr., Baillleul A., Viener G., and Urbach H.P. Spectrochim. Acta, Part B 52 (1997) 829
10. Kumakhov M.A., and Komarov F.F. Phys. Rep. 191 (1990) 289
11. Ding X., Xie J., He Y., Pan Q., and Yan Y. Talanta 53 (2000) 17
12. Yang J., Ding X.l., and Liang Ch.l. Appl. Surf. Sci. 253 (2007) 8352
13. Tsuji K., Spolnik Z., Wagatsuma K., Zhang J., and Van Grieken R. Spectrochim. Acta, Part B 54 (1999) 1243
14. Biehe S., and Hongwen X. Rev. Sci. Instrum. 69 (1998) 816
15. Yuguang W., Tonghe Z., Andong L., Xu Z., and Gu Z. Vacuum 69 (2003) 461
16. Yang J.H., Cheng M.F., Luo X.D., and Zhang T.H. Mater. Sci. Eng., A 445-446 (2007) 558
17. Urbach H.P., and de Bokx P.K. Phys. Rev. B 63 (2001) 0854081
18. Haschke M., and Haller M. X-Ray Spectrom. 32 (2003) 239
19. Noma T., Miyata H., and Ino S. J. Appl. Phys. 31 (1992) L900
20. Okhrimovskyy A., and Tsuji K. X-Ray Spectrom. 35 (2006) 305
21. Han S., Chen H.Y., Chang K.L., Weng K.W., Wang D.Y., Lu F.H., and Shih H.C. Thin Solid Films 447-448 (2004) 425
22. de Bokx P.K., and Urbach H.P. Rev. Sci. Instrum. 66 (1995) 15
23. Noma T., Iida A., and Sakurai K. Phys. Rev., B 48 (1993) 17524