SCOPUS 정보 검색 플랫폼

Volumn 125, Issue 2, 1998, Pages 129-136

Characterization of titanium nitride layers by grazing-emission X-ray fluorescence spectrometry

Author keywords

Grazing emission: Diffusion barriers; Thin films; X ray fluorescence

Indexed keywords

ARGON; DENSITY (SPECIFIC GRAVITY); DIFFUSION IN SOLIDS; FLUORESCENCE; NITROGEN; PROCESS CONTROL; SPECTROMETRY; SPUTTERING; STOICHIOMETRY; THIN FILMS;

GRAZING EMISSION X RAY FLUORESCENCE SPECTROMETRY;

TITANIUM NITRIDE;

EID: 0031998266 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00412-1 Document Type: Article

Times cited : (14)

References (16)

1
- 0018000998
- M.-A. Nicolet, Thin Solid Film 52 (1978) 415-443.
- (1978) Thin Solid Film , vol.52 , pp. 415-443
- Nicolet, M.-A.¹

2
- 57849122054
- M. Wittmer, J. Vac Sci. Technol. A 2 (2) (1984) 273-280.
- (1984) J. Vac Sci. Technol. A , vol.2 , Issue.2 , pp. 273-280
- Wittmer, M.¹

3
- 0043060511
- D. Pramanik, V. Gain, Solid State Tech. 5 (1997) 97-102.
- (1997) Solid State Tech. , vol.5 , pp. 97-102
- Pramanik, D.¹ Gain, V.²

4
- 0022080421
- J.E. Sundgren, Thin Solid Films 128 (1985) 21-44.
- (1985) Thin Solid Films , vol.128 , pp. 21-44
- Sundgren, J.E.¹

5
- 0020194945
- C.Y. Ting, M. Wittmer, Thin Solid Films 96 (1982) 327-345.
- (1982) Thin Solid Films , vol.96 , pp. 327-345
- Ting, C.Y.¹ Wittmer, M.²

6
- 36549097149
- M. Mändel, H. Hoffmann, P. Kücher, J. Appl. Phys. 68 (5) (1990) 2127-2132.
- (1990) J. Appl. Phys. , vol.68 , Issue.5 , pp. 2127-2132
- Mändel, M.¹ Hoffmann, H.² Kücher, P.³

7
- 0027836484
- J.B. Price, J.Q. Borland, S. Selbrede, Thin Solid Films 236 (1993) 311-318.
- (1993) Thin Solid Films , vol.236 , pp. 311-318
- Price, J.B.¹ Borland, J.Q.² Selbrede, S.³

8
- 0026971607
- H. Joswig, W. Palmer, Thin Solid Films 221 (1992) 228-232.
- (1992) Thin Solid Films , vol.221 , pp. 228-232
- Joswig, H.¹ Palmer, W.²

9
- 0024052954
- R.C. Ellwanger, J.M. Towner, Thin Solid Films 161 (1988) 289-304.
- (1988) Thin Solid Films , vol.161 , pp. 289-304
- Ellwanger, R.C.¹ Towner, J.M.²

10
- 0347305828
- P.K. de Bokx, H.P. Urbach, Rev. Sci. Instr. 66 (1) (1995) 15-19.
- (1995) Rev. Sci. Instr. , vol.66 , Issue.1 , pp. 15-19
- De Bokx, P.K.¹ Urbach, H.P.²

11
- 0000587165
- H.P. Urbach, P.K. de Bokx, Phys. Rev. B 53 (7) (1996) 3752-3763.
- (1996) Phys. Rev. B , vol.53 , Issue.7 , pp. 3752-3763
- Urbach, H.P.¹ De Bokx, P.K.²

12
- 0003732829
- Ox Bow Press, Woodbridge, Connecticut
- R.W. James, The Optical Principles of the Diffraction of X-Rays, Ox Bow Press, Woodbridge, Connecticut, 1962.
- (1962) The Optical Principles of the Diffraction of X-Rays
- James, R.W.¹

13
- 0001260124
- R.S. Becker, J.A. Golovchenko, J.R. Patel, Phys. Rev. Lett. 50 (3) (1983) 153-156.
- (1983) Phys. Rev. Lett. , vol.50 , Issue.3 , pp. 153-156
- Becker, R.S.¹ Golovchenko, J.A.² Patel, J.R.³

14
- 0041557555
- T. Noma, A. Iida, K. Sakurai, Phys. Rev. B 48 (1993) 17525.
- (1993) Phys. Rev. B , vol.48 , pp. 17525
- Noma, T.¹ Iida, A.² Sakurai, K.³

15
- 0024900784
- P. Panjan, B. Navinšek, A. Zakar, D. Mandrino, M. Godec, M. Koxelj, Z. Krivokapic, A. Zalar, Thin Solid Films 181 (1989) 35-41.
- (1989) Thin Solid Films , vol.181 , pp. 35-41
- Panjan, P.¹ Navinšek, B.² Zakar, A.³ Mandrino, D.⁴ Godec, M.⁵ Koxelj, M.⁶ Krivokapic, Z.⁷ Zalar, A.⁸

16
- 0027836484
- J.B. Price, J.O. Borland, S. Selbrede, Thin Solid Films 236 (1993) 311-318.
- (1993) Thin Solid Films , vol.236 , pp. 311-318
- Price, J.B.¹ Borland, J.O.² Selbrede, S.³

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