A new film analysis method using polycapillary X-ray lens

Applied Surface Science

Volumn 253, Issue 20, 2007, Pages 8352-8355

  Yang, Jun ^a   Ding, Xunliang ^a   Liang, Changlin ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Film; Grazing exit micro X ray fluorescence; Polycapillary X ray lens

Indexed keywords

FILM THICKNESS; FLUORESCENCE; REFLECTION; SEMICONDUCTOR DEVICE MANUFACTURE; X RAY ANALYSIS; X RAY SCATTERING;

GRAZING EXIT MICRO X-RAY FLUORESCENCE; POLYCAPILLARY X-RAY LENS; SEMICONDUCTOR INDUSTRY;

LENSES;

EID: 34548527722     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.03.038     Document Type: Article

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