Synchrotron Radiation-excited Glancing Incidence XRF for Depth Profile and Thin-Film Analysis of Light Elements

X-Ray Spectrometry

Volumn 28, Issue 4, 1999, Pages 292-296

  Kregsamer, P ^a   Streli, Christina ^a   Wobrauschek, P ^a   Gatterbauer, H ^a   Pianetta, P ^b   Palmetshofer, L ^c   Brehm, Lora L ^d  

^a TU WIEN   (Austria)

^b SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^d DOW CHEMICAL COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; FLUORESCENCE; GERMANIUM COMPOUNDS; SILICON WAFERS; SYNCHROTRONS; THIN FILMS; X RAY DETECTORS; X RAY SPECTROMETERS; X RAY SPECTROSCOPY;

ANALYSIS OF LIGHT ELEMENTS; BEAM-LINES; CONVENTIONAL INSTRUMENTS; DEPTH-PROFILE; ELEMENT CARBONS; GLANCING INCIDENCE; LOW Z-ELEMENTS; SPECIAL ENERGY; THIN FILM ANALYSIS; X RAY FLUORESCENCE ANALYSIS;

SYNCHROTRON RADIATION;

EID: 0033414687     PISSN: 00498246     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4539(199907/08)28:4<292::AID-XRS354>3.0.CO;2-A     Document Type: Article

References (9)

1. C. Streli, P. Wobrauschek, V. Bauer, P. Kregsamer, R. Görgl, P. Pianetta, R. Ryon, S. Pahlke and L. Fabry, Spectrochim. Acta Part B 52, 861 (1997).
2. C. Streli, P. Wobrauschek, E. Untried and H. Aiginger, Nucl. Instrum Methods A 334, 425 (1993).
3. L. Pan, P. L. King, P. Pianetta, D. Seligson and T. W. Barbee, Nucl. Instrum Methods A 266, 287 (1988).
4. M. Kaufmann, Doctoral Thesis, Technische Universität Wien (1995).
5. M. Kaufmann, M. Mantler and F. Weber, Adv. X-Ray Anal. 39, 701 (1997).
6. D. K. G. de Boer and W. W. van den Hoogenhof, Spectrochim. Acta, part B 46, 1323 (1991).
7. D. K. G. de Boer, Phys. Rev. 844, 498 (1991).
8. B. Henke, E. Gullikson and Davis, At. Data Nucl. Data Tables 54, 181 (1993).
9. WinGixa Version 1.0. Philips Electronics, Eindhoven (1997).