Modeling and fabrication of a MEMS magnetostatic magnetic sensor

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 408-416

  Ciudad, D ^a   Aroca, C ^a   Sanchez M C ^b   Lopez, E ^b   Sanchez P ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

Cantilever; Magnetometer; Magnetostatic; MEMS; Sensor

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; MAGNETIZATION; MAGNETOMETERS; MAGNETOSTATICS; SENSORS;

MAGNETIC POLES; MAGNETOSTATIC MAGNETIC SENSORS; PRESSURE SENSORS; UNEXPLODED ORDNANCE (UXO);

MICROELECTROMECHANICAL DEVICES;

EID: 4544378929     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.049     Document Type: Conference Paper

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