Ferromagnetic micromechanical magnetometer

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 88-97

  Yang, H H ^a   Myung, N V ^a   Yee, J ^a   Park, D Y ^a   Yoo, B Y ^a   Schwartz, M ^a   Nobe, K ^a   Judy, J W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrodeposition; Ferromagnetic materials; MEMS magnetometer

Indexed keywords

ALLOYS; ELECTRODEPOSITION; EQUIPMENT TESTING; FABRICATION; FERROMAGNETIC MATERIALS; MAGNETIC FIELDS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON;

FERROMAGNETIC MICROMECHANICAL MAGNETOMETER; MAGNETIC ALLOYS; SURFACE MICROMACHINED POLYSILICON STRUCTURES;

MAGNETOMETERS;

EID: 0036544043     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00809-3     Document Type: Conference Paper

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