Moisture measurement using porous aluminum oxide coated microcantilevers

Sensors and Actuators, B: Chemical

Volumn 134, Issue 2, 2008, Pages 390-395

  Kapa, Prathima ^a   Pan, Liu ^a   Bandhanadham, Arogydeepika ^a,b   Fang, Ji ^a   Varahramyan, Koday ^a   Davis, Wes ^b   Ji, Hai Feng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b Sensidyne Inc Clearwater   (United States)

Author keywords

Microcantilever; Porous aluminum oxide; Resonance frequency; Sensor; Surface stress

Indexed keywords

MICROCANTILEVER; POROUS ALUMINUM OXIDE; RESONANCE FREQUENCY; SENSOR; SURFACE STRESS;

ALUMINA;

EID: 51649088882     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.05.014     Document Type: Article

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