Al2O3-coated microcantilevers for detection of moisture at ppm level

Sensors and Actuators, B: Chemical

Volumn 129, Issue 1, 2008, Pages 241-245

  Shi, Xiaolei ^a   Chen, Qi ^a   Fang, Ji ^a   Varahramyan, Koday ^a   Ji, Hai Feng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Al2O3; Aluminum oxide; Microcantilever; Moisture; Natural gas; Sensors

Indexed keywords

ALCOHOLS; ALUMINUM COMPOUNDS; CHEMICAL SENSORS; COATINGS; NATURAL GAS; NITROGEN;

AMBIENT CONDITIONS; MICROCANTILEVERS;

MOISTURE;

EID: 38149005562     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.08.019     Document Type: Article

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