Real-time diagnosis of nano-sized contaminant particles generated in tin metal organic chemical vapor deposition

Applied Physics Express

Volumn 2, Issue 3, 2009, Pages

  Nax, Jeonggil ^a,b   Kim, Taesung ^a,b   Choi, Jae Boong ^a,b   Yun, Ju Young ^a,b   Shin, Yong Hyeon ^a,b   Kang, Sang Woo ^a,b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; ATOMIC SPECTROSCOPY; FOURIER TRANSFORMS; INDUSTRIAL CHEMICALS; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; ORGANOMETALLICS; PARTICLE SIZE; PYROLYSIS; TIN; TITANIUM; VAPORS;

ABSORBANCE; ATOMIC-FORCE MICROSCOPIES; BEFORE AND AFTER; FOURIER TRANSFORM INFRARED; IN-SITU; METAL-ORGANIC CHEMICAL VAPOR DEPOSITIONS; NANO-SIZED; PARTICLE DISTRIBUTIONS; REAL-TIME DIAGNOSIS; TETRAKIS; THERMAL DECOMPOSITIONS;

TITANIUM NITRIDE;

EID: 62549088773     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.2.035501     Document Type: Article

References (16)

1. M. Eizenberg, K. Littau, S. Ghanayem, A. Mak, Y. Maeda, M. Chang, and A. K. Sinha: Appl. Phys. Lett. 65 (1994) 2416.
2. J.-H. Yun and S.-W. Rhee: Thin Solid Films 339 (1999) 270.
3. J. Yun, M. Park, and S. Rhee: J. Electrochem. Soc. 145 (1998) 2453.
4. J. Y. Yun, S. W. Heo, S. W. Kang, J. G. Na, Y. J. Park, Y. H. Shin, J. H. Lee, T. Kim, and D. K. Moon: Meas. Sci. Technol. 20 (2009) 025701 .
5. A. Galembeck and O. L. Alves: J. Mater. Sci. 37 (2002) 1923.
6. S. J. Kim, B. H. Kim, H. G. Woo, S. K. Kim, and D. H. Kim: Bull. Korean Chem. Soc. 27 (2006) 219.
7. P. J. Ziemann, P. Liu, N. P. Rao, D. B. Kittelson, and P. H. McMurry: J. Aerosol Sci. 26 (1995) 745.
8. P. H. McMurry, S. Nijhawan, N. Rao, P. Ziemann, D. B. Kittelson, and S. Campbell: J. Vac. Sci. Technol. A 14 (1996) 582.
9. N. P. Rao, S. Nijhawan, T. Kim, Z. Wu, P. Ziemann, S. Campbell, D. Kittelson, and P. McMurry: J. Electrochem. Soc. 145 (1998) 2051.
10. N. P. Rao, Z. Wu, S. Nijhawan, P. Ziemann, S. Campbell, D. B. Kittelson, and P. McMurry: J. Vac. Sci. Technol. B 16 (1998) 483.
11. P. Liu, P. J. Ziemann, D. B. Kittelson, and P. H. McMurry: Aerosol Sci. Technol. 22 (1995) 314.
12. P. Liu, P. J. Ziemann, D. B. Kittelson, and P. H. McMurry: Aerosol Sci. Technol. 22 (1995) 293.
13. P. J. Ziemann, P. Liu, D. B. Kittelson, and P. H. McMurry: J. Phys. Chem. 99 (1995) 5126.
14. S. Nijhawan, P. H. McMurry, and S. A. Campbell: J. Vac. Sci. Technol. A 18 (2000) 2198.
15. J. R. Creighton, G. T. Wang, W. G. Breiland, and M. E. Coltrin: J. Cryst. Growth 261 (2004) 204.
16. T. Kim, S. M. Suh, S. L. Girshick, M. R. Zachariah, P. H. McMurry, R. M. Rassel, Z. Shen, and S. A. Campbell: J. Vac. Sci. Technol. A 20 (2002) 413.