Study on effect of hydrogen treatment on amorphous carbon film using scanning probe microscopy

Ultramicroscopy

Volumn 109, Issue 5, 2009, Pages 451-456

  Xie, W G ^a   Chen, Jian ^a   Chen, Jun ^a   Ming, W W ^a   Deng, S Z ^a   Xu, N S ^a  

^a Guangdong Province Key Laboratory of Information Security   (China)

Author keywords

Amorphous carbon film; Field emission; Hydrogen treatment; Scanning probe microscope

Indexed keywords

A-C FILMS; AMORPHOUS CARBON FILM; CHEMICAL EFFECTS; CONDUCTIVE CHANNELS; EFFECT OF HYDROGENS; EMISSION ENHANCEMENTS; ETCHING EFFECTS; HYDROGEN PLASMAS; HYDROGEN TREATMENT; INTERFACE LAYERS; SCANNING PROBE MICROSCOPE; SCANNING PROBES;

CARBON FILMS; ELECTRON EMISSION; FIELD EMISSION; HYDROGEN; MICROSCOPES; PHASE INTERFACES; PLASMA DIAGNOSTICS; PLASMAS; PROBES; SCANNING; SCANNING PROBE MICROSCOPY; SURFACE MORPHOLOGY; SURFACE TREATMENT; VOLTAGE DIVIDERS; WORK FUNCTION;

AMORPHOUS CARBON;

CARBON; HYDROGEN; NANOFILM;

ARTICLE; ATOMIC FORCE MICROSCOPY; CONDUCTANCE; FIELD EMISSION; SCANNING PROBE MICROSCOPY; SURFACE PROPERTY;

EID: 62549088684     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.10.019     Document Type: Article

References (22)

1. Amaratunga G.A.J., and Silva S.R.P. Appl. Phys. Lett. 68 (1996) 2529
2. Satyanarayana B.S., Hart A., Milne W.I., and Robertson J. Appl. Phys. Lett. 8 (1997) 1430
3. Cui J.B., Robertson J., and Milne W.I. Diamond Relat. Mater. 10 (2001) 868
4. Xu N.S., and Huq S.E. Mater. Sci. Eng. R 48 (2005) 47
5. Cuomo J.J., Pappas D.L., Bruley J., Doyle J.P., and Saenger K.L. J. Appl. Phys. 70 (1991) 1706
6. Zhang L., Sakai T., Sakuma N., Ono T., and Nakayama K. Appl. Phys. Lett. 75 (1999) 3527
7. Inoue T., Ogletree D.F., and Salmeron M. Appl. Phys. Lett. 76 (2000) 2961
8. Kim Y.D., Choi W., Wakimoto H., Usami S., Tomokage H., and Ando T. Appl. Phys. Lett. 75 (1999) 3219
9. Hart A., Satyanarayana B.S., Milne W.I., and Robertson J. Appl. Phys. Lett. 74 (1999) 1594
10. Zhi C.Y., Bai D., and Wang E.G. Appl. Phys. Lett. 81 (2002) 1690
11. Geis M.W., Twichell J.C., Macaulay J., and Okano K. Appl. Phys. Lett. 67 (1995) 1328
12. Xie W.G., Chen J., Chen J., Deng S.Z., She J.C., and Xu N.S. J. Appl. Phys. 101 (2007) 084315
13. Wei A.X., Chen D.H., Ke N., Peng S.Q., and Wang S.P. Diamond Relat. Mater. 6 (1997) 983
14. Suzuki S., Bower C., Watanabe Y., and Zhou O. Appl. Phys. Lett. 76 (2000) 4007
15. Hakovirta M., Tiainen V.M., and Pekko P. Diamond Relat. Mater. 8 (1999) 1183
16. Zhang L., Sakai T., and Sakuma N. Appl. Phys. Lett. 75 (1999) 3527
17. Cui J.B., Ristein J., and Ley L. Phys. Rev. Lett. 81 (1998) 429
18. Ilie A., Hart A., Flewitt A.J., Robertson J., and Milne W.I. J. Appl. Phys. 88 (2000) 6002
19. Hare R.W., Hill R.M., and Budd C.J. J. Phys. D 26 (1993) 1084
20. Xu N.S., Chen J., and Deng S.Z. Appl. Phys. Lett. 75 (2000) 2463
21. Davis C.A., Knowles K.M., and Amaratunga G.A.J. Phys. Rev. Lett. 80 (1998) 3280
22. Robertson J., and Milne W. J. Non-cryst. Solids 227-230 (1998) 558