EUV wavefront measurement of six-mirror optic using EWMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Sugisaki, K ^a   Okada, M ^a   Otaki, K ^a   Zhu, Y ^a   Kawakami, J ^a   Murakami, K ^a   Ouchi, C ^b   Hasegawa, M ^b   Kato, S ^b   Hasegawa, T ^b   Yokota, H ^b   Honda, T ^b   Niibe, M ^c  

^a EUVA Sagamihara R and D Center   (Japan)

^b EUVA Utsunomiya R and D Center   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

At wavelength; EUV; Shearing interferometer; Six mirror projection optic; Wavefront metrology

Indexed keywords

AT-WAVELENGTH; EUV; PROJECTION OPTICS; SHEARING INTERFEROMETER; WAVEFRONT METROLOGY;

INTERFEROMETERS; MIRRORS; OPTICAL TESTING; SHEARING; TENSORS; UNITS OF MEASUREMENT;

WAVEFRONTS;

EID: 62449314764     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772624     Document Type: Conference Paper

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