SCOPUS 정보 검색 플랫폼

Shinku/Journal of the Vacuum Society of Japan

Volumn 51, Issue 11, 2008, Pages 714-718

Development of domestic spherical aberration correction electron microscope, R005

(3) Tanishiro, Yasumasa a,b Kondo, Yukihito a,c Takayanagi, Kunio a,b

a JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

b TOKYO INSTITUTE OF TECHNOLOGY (Japan)

c JEOL LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRONS; TRANSMISSION ELECTRON MICROSCOPY;

ABERRATION CORRECTORS; AUTOMATIC ABERRATION CORRECTION; CHROMATIC ABERRATION; HIGH RESOLUTION SCANNING; HIGH-ANGLE ANNULAR DARK FIELDS; IMAGE-FORMING SYSTEMS; SPHERICAL ABERRATION CORRECTION; SPHERICAL ABERRATIONS;

ASPHERICS;

EID: 61849155198 PISSN: 05598516 EISSN: None Source Type: Journal
DOI: 10.3131/jvsj2.51.714 Document Type: Article

Times cited : (1)

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