Measurement method of aberration from Ronchigram by autocorrelation function

Ultramicroscopy

Volumn 108, Issue 11, 2008, Pages 1467-1475

  Sawada, H ^a,b   Sannomiya, T ^a,b   Hosokawa, F ^a,b   Nakamichi, T ^b   Kaneyama, T ^a,b   Tomita, T ^a,b   Kondo, Y ^a,b   Tanaka, T ^a,c   Oshima, Y ^a,c   Tanishiro, Y ^a,c   Takayanagi, K ^a,c  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b JEOL LTD   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Aberration; Astigmatism; Autocorrelation function; Ronchigram; Scanning electron microscope; Spherical aberration correction

Indexed keywords

ABERRATIONS; CORRELATION DETECTORS; REGRESSION ANALYSIS;

ABERRATION; ABERRATION MEASUREMENTS; ASTIGMATISM; AUTOCORRELATION FUNCTION; CONVERGENCE ANGLE; FORMING SYSTEMS; MEASUREMENT METHODS; RONCHIGRAM; SCANNING ELECTRON MICROSCOPE; SPHERICAL ABERRATION CORRECTION; SPHERICAL ABERRATIONS; UNIFORM PHASE;

OPTICAL PROPERTIES;

ARTICLE; CALCULATION; CORRELATION ANALYSIS; MEASUREMENT; MICROSCOPE; MICROSCOPY; SIMULATION;

EID: 52949121400     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.04.095     Document Type: Article

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