Accurate topographic images using a measuring atomic force microscope

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 505-509

  Gonda, S ^a   Doi, T ^a   Kurosawa, T ^a   Tanimura, Y ^a   Hisata, N ^b   Yamagishi, T ^b   Fujimoto, H ^b   Yukawa, H ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

AFM (atomic force microscope); Calibration; Interferometry; Nanometrology

Indexed keywords

CALIBRATION; DIGITAL SIGNAL PROCESSING; IMAGE ANALYSIS; INTERFEROMETERS; MIRRORS; SCANNING; SURFACES;

HOMODYNE DETECTION SYSTEM; LASER INTERFEROMETER; NANOMETROLOGY; TOPOGRAPHIC IMAGES;

ATOMIC FORCE MICROSCOPY;

EID: 0032655397     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00851-4     Document Type: Article

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