0.69 nm resolution ultrasonic motor for large stroke precision stage

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 397-402

  Egashira, Yoshiya ^a,b   Kosaka, Kouji ^b,c   Takada, Shinji ^b   Iwabuchi, Tetsuya ^b   Baba, Tetsuro ^c   Moriyama, Shiro ^d   Harada, Takashi ^a   Nagamoto, Keiichi ^a   Nakada, Akira ^a   Kubota, Hiroshi ^a   Ohmi, Tadahiro ^e  

^a KUMAMOTO UNIVERSITY   (Japan)

^b Kamimashiki Co   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^d Nihon Ceratec Co Ltd   (Japan)

^e TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MOTORS; NANOELECTRONICS; NANOTECHNOLOGY; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MOTORS; ULTRASONIC EQUIPMENT; ULTRASONIC MACHINE TOOLS;

CLOSED-LOOP CONTROL; CONSTANT VELOCITIES; DC CHARACTERISTICS; POSITION ACCURACY; POSITIONING ACCURACY; STAGE PERFORMANCE; ULTRA-PRECISION POSITIONING; ULTRA-PRECISION STAGE;

CLOSED LOOP CONTROL SYSTEMS;

EID: 84949235557     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966455     Document Type: Conference Paper

References (14)

1. J S. Satou, T. Ishii, and K. Kosaka, Technical report Nikkei Mechanical, no. 507, pp. 74-79, May. 26 1997. [in Japanese]
2. S. Ku, G. Larsen, and S. Cetinkunt, "Fast tool servo control for ultra-precision machining at extremely low feed rates", Mechatronics, vol. 8, pp. 381-393, 1998.
3. H. J. Pahk, D. S. Lee, and J. H. Park, "Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation", Int. J. Machine Tools & Manufacture, vol. 41, pp. 51-63, 2001.
4. K. Uchino, "Piezoelectric ultrasonic motors: overview", Smart Mater. Struct., vol. 7, pp. 273-285, 1998.
5. T. Hemsel, and J. Wallaschek, "Survey of the present state of the art of piezoelectric linear motors", Ultrasonics, vol. 38, pp. 37-40, 2000.
6. T. Kunioka, Y. Takeda, T. Matsuda, N. Shimazu, and Y. Nakayama, "XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3'", J. Vac. Sci. Technol. B, vol. 17(6), pp. 2917-2920, Nov./Dec. 1999.
7. P. Gao, H. Tan, and Z. Yuan, "The design and characterization of a piezo-driven ultra-precision stepping positioner", Meas. Sci. Technol., vol. 11, pp. 15-19, 2000.
8. X. Zhu, J. Xu, Z. Meng, J. Zhu, S. Zhou, Q. Li, Z. Liu, and N. Ming, "Microdisplacement characteristics and microstructures of functionally graded piezoelectric ceramic actuator", Mater. Design., vol. 21, pp. 561-566, 2000.
9. T. Chang, and X. Sun, "Analysis and Control of Monolithic Piezoelectric Nano-Actuator", IEEE Trans. Com. Sys. Technol. vol. 9, no. 1, pp. 69-75, Jan. 2001.
10. Burleigh INCHWORM Nanopositioning Systems, Catalogue Burleigh Instruments Inc, Burleigh Park, Fishers, NY, 1997.
11. S. Lee, M. Esashi, "DESIGN OF THE ELECTROSTATIC Linear microactuator based on the inchworm MOTION", Mechatoronics, vol. 5, no. 8, pp. 963-972, 1995.
12. E. Shamoto, and T. Moriwaki, "Development of a "walking drive" ultraprecision positioner", Prec. Eng., vol. 20, pp. 85-92, Mar. 1997.
13. S. H. Chang, and B. C. Du, "A precision piezodriven micropositioner mechanism with large travel range", Rev. Sci. Inst., vol. 69, no. 4, pp. 1785-1791, Apr. 1998.
14. G. Mariotto, M. D'Angelo, and I. V. Shvets, "Dynamic behavior of a piezowalker, inertial and frictional configurations", Rev. Sci. Inst., vol. 70, no. 9, pp. 3651-3655, Sept. 1999.