-
1
-
-
85008040913
-
Precision positioning control apparatus and precision positioning control method
-
Sep. 1
-
Y. Okazaki, “Precision positioning control apparatus and precision positioning control method,” U.S. Patent 5 801 939, Sep. 1, 1998.
-
(1998)
U.S. Patent 5 801 939
-
-
Okazaki, Y.1
-
2
-
-
0027846403
-
Robust controller design for a dual-stage positioning system
-
W. Yao and M. Tomizuka, “Robust controller design for a dual-stage positioning system,” in Proc. Int. Conf. Ind. Electron., Control, Instrum., 1993, vol. 1, pp. 62–66.
-
(1993)
Proc. Int. Conf. Ind. Electron., Control, Instrum.
, vol.1
, pp. 62-66
-
-
Yao, W.1
Tomizuka, M.2
-
3
-
-
0033282440
-
Servo system design of a high-resolution piezo-driven fine stage for step- and repeat microlithography systems
-
K. Tsai and J. Yen, “Servo system design of a high-resolution piezo-driven fine stage for step- and repeat microlithography systems,” in Proc. Annu. Conf. Ind. Electron. Soc., 1999, vol. 1, pp. 11–16.
-
(1999)
Proc. Annu. Conf. Ind. Electron. Soc.
, vol.1
, pp. 11-16
-
-
Tsai, K.1
Yen, J.2
-
4
-
-
0033724195
-
Robust and time-optimal control strategy for coarse/fine dual-stage manipulators
-
Apr.
-
S. Kwon, W. Chang, and Y. Youm, “Robust and time-optimal control strategy for coarse/fine dual-stage manipulators,” in Proc. IEEE Int. Conf. Robot. Autom., Apr. 2000, vol. 4, pp. 4051–4056.
-
(2000)
Proc. IEEE Int. Conf. Robot. Autom.
, vol.4
, pp. 4051-4056
-
-
Kwon, S.1
Chang, W.2
Youm, Y.3
-
5
-
-
0034877732
-
On the coarse/fine dual-stage manipulators with robust perturbation compensator
-
May
-
S. Kwon, W. Chang, and Y. Youm, “On the coarse/fine dual-stage manipulators with robust perturbation compensator,” in Proc. IEEE Int. Conf. Robot. Autom., May 2001, vol. 1, pp. 121–126.
-
(2001)
Proc. IEEE Int. Conf. Robot. Autom.
, vol.1
, pp. 121-126
-
-
Kwon, S.1
Chang, W.2
Youm, Y.3
-
6
-
-
0031097944
-
Developing a linear piezomotor with nanometer resolution and high stiffness
-
Mar.
-
B. Zhang and Z. Zhu, “Developing a linear piezomotor with nanometer resolution and high stiffness,” IEEE/ASME Trans. Mech., vol. 2, no. 1, pp. 22–29, Mar. 1997.
-
(1997)
IEEE/ASME Trans. Mech.
, vol.2
, Issue.1
, pp. 22-29
-
-
Zhang, B.1
Zhu, Z.2
-
7
-
-
0037344047
-
A control methodology for an inchworm piezomotor
-
R. Ben Mrad, A. Abhari, and J. Zu, “A control methodology for an inchworm piezomotor,” J. Mech. Syst. Signal Process., vol. 17, pp. 457–471, 2003.
-
(2003)
J. Mech. Syst. Signal Process.
, vol.17
, pp. 457-471
-
-
Ben Mrad, R.1
Abhari, A.2
Zu, J.3
-
10
-
-
33947188519
-
Complementary inchworm actuator for high-force high-precision applications
-
Jun.
-
S. Salisbury, D. F. Waechter, R. Ben Mrad, S. E. Prasad, R. G. Blacow, and B. Yan, “Complementary inchworm actuator for high-force high-precision applications,” IEEE/ASME Trans. Mechatron., vol. 11, no. 3, pp. 265–272, Jun. 2006.
-
(2006)
IEEE/ASME Trans. Mechatron.
, vol.11
, Issue.3
, pp. 265-272
-
-
Salisbury, S.1
Waechter, D.F.2
Ben Mrad, R.3
Prasad, S.E.4
Blacow, R.G.5
Yan, B.6
-
11
-
-
0032672923
-
Design and performance of a high force piezoelectric inchworm motor
-
Mar.
-
J. Frank, G. Koopmann, W. Chen, and G. Lesieutre, “Design and performance of a high force piezoelectric inchworm motor,” Proc. SPIE, vol. 3668, pp. 717–723, Mar. 1999.
-
(1999)
Proc. SPIE
, vol.3668
, pp. 717-723
-
-
Frank, J.1
Koopmann, G.2
Chen, W.3
Lesieutre, G.4
-
12
-
-
0032095914
-
A linear piezoelectric motor
-
D. Newton, E. Garcia, and G. Homer, “A linear piezoelectric motor,” Smart Mater. Struct., vol. 7, no. 3, pp. 295–304, 1998.
-
(1998)
Smart Mater. Struct.
, vol.7
, Issue.3
, pp. 295-304
-
-
Newton, D.1
Garcia, E.2
Homer, G.3
-
13
-
-
0032098696
-
Analytical and experimental study on a piezoelectric linear motor
-
S. Ling, H. Du, and T. Jiang, “Analytical and experimental study on a piezoelectric linear motor,” Smart Mater. Struct., vol. 7, no. 3, pp. 382–388, 1998.
-
(1998)
Smart Mater. Struct.
, vol.7
, Issue.3
, pp. 382-388
-
-
Ling, S.1
Du, H.2
Jiang, T.3
-
14
-
-
85008040918
-
-
LAB VIEW Real-Time Version 6.0.3, National Instruments Corporation. Austin, TX
-
LAB VIEW Real-Time, Version 6.0.3, National Instruments Corporation. Austin, TX, 2001.
-
(2001)
-
-
-
15
-
-
0036969696
-
A model for voltage-to-displacement dynamics in piezoceramic actuators subject to dynamic-voltage excitations
-
Dec.
-
R. Ben Mrad and H. Hu, “A model for voltage-to-displacement dynamics in piezoceramic actuators subject to dynamic-voltage excitations,” IEEE Trans. Mechatron., vol. 7, no. 4, pp. 479–489, Dec. 2002.
-
(2002)
IEEE Trans. Mechatron.
, vol.7
, Issue.4
, pp. 479-489
-
-
Ben Mrad, R.1
Hu, H.2
-
16
-
-
0029342693
-
Modeling hysteresis in piezoceramic actuators
-
Jul.
-
P. Ge and M. Jouaneh, “Modeling hysteresis in piezoceramic actuators,” Precis. Eng., vol. 17, pp. 211–221, Jul. 1995.
-
(1995)
Precis. Eng.
, vol.17
, pp. 211-221
-
-
Ge, P.1
Jouaneh, M.2
-
17
-
-
85008050828
-
-
Release 13, MathWorks, Inc., Natick, MA
-
MATLAB, Version 6.5, Release 13, MathWorks, Inc., Natick, MA, 2004.
-
(2004)
-
-
|