ALN piezoelectric microactuator array

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 662-667

  Ruffieux, D ^a   Dubois, M A ^a   de Rooij, N F ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ETCHING; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON WAFERS;

PIEZOELECTRIC MICROACTUATOR ARRAYS;

MICROACTUATORS;

EID: 0033692645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)