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Volumn 19, Issue 2, 1999, Pages 31-39

Hybrid Force-Position Control of Clamping with a Piezo-Stepper

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FORCE CONTROL; MOTION CONTROL; PIEZOELECTRIC DEVICES; POSITION CONTROL; STEP RESPONSE; STIFFNESS; TRACTION (FRICTION);

EID: 0033116181     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/37.753933     Document Type: Article
Times cited : (5)

References (19)
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    • (1993) Annals CIRP , vol.42 , Issue.2 , pp. 723-732
    • Inasaki, I.1    Tonshoff, H.K.2    Howes, T.D.3
  • 2
    • 0029231067 scopus 로고
    • Analysis of mirror surface generation of hard and brittle materials by ELID grinding
    • H. Ohmori and T. Nakagawa, “Analysis of mirror surface generation of hard and brittle materials by ELID grinding,” Annals CIRP, vol. 44, no. 1, pp. 287-290, 1995.
    • (1995) Annals CIRP , vol.44 , Issue.1 , pp. 287-290
    • Ohmori, H.1    Nakagawa, T.2
  • 4
    • 0025458451 scopus 로고
    • Piezoelectric ceramic actuators: A review of machinery applications
    • F.G. King, M.E. Preston, B.J.M. Murphy, and D.S. Canell, “Piezoelectric ceramic actuators: A review of machinery applications,” Precision Engineering, vol. 12, no. 3, pp. 131-136, 1990.
    • (1990) Precision Engineering , vol.12 , Issue.3 , pp. 131-136
    • King, F.G.1    Preston, M.E.2    Murphy, B.J.M.3    Canell, D.S.4
  • 5
    • 5544236143 scopus 로고
    • Novel piezo-electric-driven XYθ wafer table for an electron beam image projector
    • K. Sugihara and T. Shinozaki, “Novel piezo-electric-driven XYθ wafer table for an electron beam image projector,” Precision Engineering, pp. 174-175, 1985.
    • (1985) Precision Engineering , pp. 174-175
    • Sugihara, K.1    Shinozaki, T.2
  • 6
  • 7
    • 0030712601 scopus 로고    scopus 로고
    • A linear piezo-motor of high stiffness and nanometer resolution
    • B. Zhang, Z. Zhu, B. Zhang, W. Fu, J. Wang, “A linear piezo-motor of high stiffness and nanometer resolution,” Annals CIRP, vol. 46, no. 1, pp. 305-308, 1997.
    • (1997) Annals CIRP , vol.46 , Issue.1 , pp. 305-308
    • Zhang, B.1    Zhu, Z.2    Zhang, B.3    Fu, W.4    Wang, J.5
  • 8
    • 0030701157 scopus 로고    scopus 로고
    • Rigid XYθ table for ultraprecision machine tool driven by means of walking drive
    • E. Shamoto and T. Moriwaki, “Rigid XYθ table for ultraprecision machine tool driven by means of walking drive,” Annals CIRP, vol. 46, no. 1, pp. 301-304, 1997.
    • (1997) Annals CIRP , vol.46 , Issue.1 , pp. 301-304
    • Shamoto, E.1    Moriwaki, T.2
  • 14
    • 0029721120 scopus 로고    scopus 로고
    • Ultraprecision feed system based on walking drive
    • T. Moriwaki and E. Shamoto, “Ultraprecision feed system based on walking drive,” Annals CIRP. vol. 45, no. 1, pp. 505-508, 1996.
    • (1996) Annals CIRP , vol.45 , Issue.1 , pp. 505-508
    • Moriwaki, T.1    Shamoto, E.2
  • 15
    • 0031097016 scopus 로고    scopus 로고
    • The development of a ‘walking drive’ ultraprecision positioner
    • E. Shamoto and T. Moriwaki, “The development of a ‘walking drive’ ultraprecision positioner,” Precision Engineering, pp. 85-92, 1997.
    • (1997) Precision Engineering , pp. 85-92
    • Shamoto, E.1    Moriwaki, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.