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Volumn 187-188, Issue , 2007, Pages 241-244

A precision alignment method of micro tensile testing specimen using mechanical gripper

Author keywords

Micro gripper; Micro tensile test; Micromanipulator; Misalign

Indexed keywords

BENDING (DEFORMATION); MICROMANIPULATORS; RELIABILITY; TENSILE TESTING;

EID: 33947111887     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.11.170     Document Type: Article
Times cited : (15)

References (9)
  • 2
    • 0032026436 scopus 로고    scopus 로고
    • Specimen size effect on tensile strength of surface-micro machined polycrystalline silicon thin films
    • Tsuchiya T., Tobato O., Sakata J., and Taga Y. Specimen size effect on tensile strength of surface-micro machined polycrystalline silicon thin films. J. Microelectromech. Syst. 7 (1998) 106-113
    • (1998) J. Microelectromech. Syst. , vol.7 , pp. 106-113
    • Tsuchiya, T.1    Tobato, O.2    Sakata, J.3    Taga, Y.4
  • 4
    • 0032296649 scopus 로고    scopus 로고
    • Mechanical properties of thin polysilicon films by means of probe microscopy
    • Chasiotis I., and Knauss W. Mechanical properties of thin polysilicon films by means of probe microscopy. Proceedings of SPIE, vol. 3512 (1998) 66-75
    • (1998) Proceedings of SPIE, vol. 3512 , pp. 66-75
    • Chasiotis, I.1    Knauss, W.2
  • 5
    • 33947121012 scopus 로고    scopus 로고
    • W.N. Sharpe Jr., An interferometric strain/displacement measurement system, NASA Technical Memorandum, 1989, 101638.
  • 6
    • 0031236953 scopus 로고    scopus 로고
    • A new technique for measuring the mechanical properties of thin films
    • Sharpe Jr. W.N., Yuan B., and Edwards R.L. A new technique for measuring the mechanical properties of thin films. J. Microelectromech. Syst. 6 (1997) 193-199
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 193-199
    • Sharpe Jr., W.N.1    Yuan, B.2    Edwards, R.L.3
  • 9
    • 0033750801 scopus 로고    scopus 로고
    • Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength
    • Yi T., Li L., and Kim C.J. Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength. Sens. Actuators A: Phys. 83 (2000) 172-178
    • (2000) Sens. Actuators A: Phys. , vol.83 , pp. 172-178
    • Yi, T.1    Li, L.2    Kim, C.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.