SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 2, 2009, Pages 336-341

Optimal design of antireflection coating and experimental verification by plasma enhanced chemical vapor deposition in small displays

(3) Yang, S M a Hsieh, Y C a Jeng, C A b

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b I Sou University (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; ELECTRIC IMPEDANCE; FILM PREPARATION; LIGHT SOURCES; LIQUID CRYSTAL DISPLAYS; LIQUID CRYSTALS; MULTILAYERS; OPTICAL CONSTANTS; OPTIMAL SYSTEMS; OPTIMIZATION; PLASMA DEPOSITION; PLASMAS; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILANES; THIN FILM DEVICES; VAPORS;

ADMITTANCE LOCUS; EXPERIMENTAL VERIFICATIONS; MATERIAL SELECTIONS; OPTIMAL DESIGNS; QUARTER WAVELENGTHS; SILICON SUBSTRATES; SMALL DISPLAYS; THIN-FILM; THREE LAYERS; TOTAL REFLECTIONS; TWO LAYERS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 61449096620 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3081962 Document Type: Article

Times cited : (20)

References (20)

1
- 0036531843
- 0141-9382
- H. Oyama and N. Shiramatsu, Displays 23, 31 (2002). 0141-9382
- (2002) Displays , vol.23 , pp. 31
- Oyama, H.¹ Shiramatsu, N.²

2
- 5744236570
- 0018-9219 10.1109/JPROC.2002.1002520.
- D. Mentley, Proc. IEEE 0018-9219 10.1109/JPROC.2002.1002520 90, 453 (2002).
- (2002) Proc. IEEE , vol.90 , pp. 453
- Mentley, D.¹

3
- 0036608804
- 0003-6935 10.1364/AO.41.003107.
- U. Schulz, U. B. Schallenberg, and N. Kaiser, Appl. Opt. 0003-6935 10.1364/AO.41.003107 41, 3107 (2002).
- (2002) Appl. Opt. , vol.41 , pp. 3107
- Schulz, U.¹ Schallenberg, U.B.² Kaiser, N.³

4
- 0011406715
- 0042-207X
- T. Oyama and T. Yamada, Vacuum 59, 479 (2000). 0042-207X
- (2000) Vacuum , vol.59 , pp. 479
- Oyama, T.¹ Yamada, T.²

5
- 33344456186
- P. A. van Nijnatten, Thin Solid Films 502, 147 (2006).
- (2006) Thin Solid Films , vol.502 , pp. 147
- Van Nijnatten, P.A.¹

6
- 0033707847
- 0257-8972
- N. Y. Kim, Y. B. Son, J. H. Oh, C. K. Hwangbo, and M. C. Park, Surf. Coat. Technol. 128-129, 156 (2000). 0257-8972
- (2000) Surf. Coat. Technol. , vol.128-129 , pp. 156
- Kim, N.Y.¹ Son, Y.B.² Oh, J.H.³ Hwangbo, C.K.⁴ Park, M.C.⁵

7
- 0033170223
- H. Ishikawa, Y. Honjo, and K. Watanabe, Thin Solid Films 351, 212 (1999).
- (1999) Thin Solid Films , vol.351 , pp. 212
- Ishikawa, H.¹ Honjo, Y.² Watanabe, K.³

8
- 33751001310
- 0257-8972
- N. Yamaguchi, K. Tadanaga, A. Matsuda, T. Minami, and M. Tatsumisago, Surf. Coat. Technol. 201, 3653 (2006). 0257-8972
- (2006) Surf. Coat. Technol. , vol.201 , pp. 3653
- Yamaguchi, N.¹ Tadanaga, K.² Matsuda, A.³ Minami, T.⁴ Tatsumisago, M.⁵

9
- 21144447746
- 0957-4484 10.1088/0957-4484/16/7/005.
- K. Krogman, T. Druffel, and M. K. Sunkara, Nanotechnology 0957-4484 10.1088/0957-4484/16/7/005 16, S338 (2005).
- (2005) Nanotechnology , vol.16 , pp. 338
- Krogman, K.¹ Druffel, T.² Sunkara, M.K.³

10
- 0034318489
- 0734-2101 10.1116/1.1314395.
- L. Martinu and D. Poitras, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1314395 18, 2619 (2000).
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2619
- Martinu, L.¹ Poitras, D.²

11
- 0031549363
- 0022-3093 10.1016/S0022-3093(97)00198-1.
- R. Gordon, J. Non-Cryst. Solids 0022-3093 10.1016/S0022-3093(97)00198-1 218, 81 (1997).
- (1997) J. Non-Cryst. Solids , vol.218 , pp. 81
- Gordon, R.¹

12
- 0029657431
- 0257-8972 10.1016/0257-8972(95)02420-4.
- H. Chatham, Surf. Coat. Technol. 0257-8972 10.1016/0257-8972(95)02420-4 78, 1 (1996).
- (1996) Surf. Coat. Technol. , vol.78 , pp. 1
- Chatham, H.¹

13
- 21144462951
- 0734-2101 10.1116/1.577790.
- A. Banerjee and T. DebRoy, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.577790 10, 3395 (1992).
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3395
- Banerjee, A.¹ Debroy, T.²

14
- 0027594934
- 0013-4651 10.1149/1.2221586.
- D. L. Smith and A. S. Alimonda, J. Electrochem. Soc. 0013-4651 10.1149/1.2221586 140, 1496 (1993).
- (1993) J. Electrochem. Soc. , vol.140 , pp. 1496
- Smith, D.L.¹ Alimonda, A.S.²

15
- 18544403363
- W. C. Cheng, F. D. Lai, M. H. Huang, and L. A. Wang, Microelectron. Eng. 73-74, 59 (2004).
- (2004) Microelectron. Eng. , vol.7374 , pp. 59
- Cheng, W.C.¹ Lai, F.D.² Huang, M.H.³ Wang, L.A.⁴

16
- 0035387765
- 0257-8972
- H. Lee, D. Kim, and K. Lee, Surf. Coat. Technol. 142-144, 468 (2001). 0257-8972
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 468
- Lee, H.¹ Kim, D.² Lee, K.³

17
- 0036603274
- 0003-6935 10.1364/AO.41.003075.
- J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree, Appl. Opt. 0003-6935 10.1364/AO.41.003075 41, 3075 (2002).
- (2002) Appl. Opt. , vol.41 , pp. 3075
- Dobrowolski, J.A.¹ Poitras, D.² Ma, P.³ Vakil, H.⁴ Acree, M.⁵

18
- 0003415938
- 3rd ed. (Institute of Physics, London).
- H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, London, 2001).
- (2001) Thin Film Optical Filters
- MacLeod, H.A.¹

19
- 0041326542
- A. Grüniger and P. R. von Rohr, Surf. Coat. Technol. 174-175, 1043 (2003).
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 1043
- Grüniger, A.¹ Von Rohr, P.R.²

20
- 0032667818
- O. O. Awadelkarim and Y. Z. Wang, Microelectron. Eng. 45, 299 (1999).
- (1999) Microelectron. Eng. , vol.45 , pp. 299
- Awadelkarim, O.O.¹ Wang, Y.Z.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.