Optical monitoring tools and strategies for controlling coating deposition in large area continuous coating processes

Thin Solid Films

Volumn 502, Issue 1-2, 2006, Pages 147-152

  Van Nijnatten, P A ^a  

^a TNO   (Netherlands)

Author keywords

Coatings; Deposition process; Monitoring; Optical spectroscopy

Indexed keywords

DEPOSITION; DIELECTRIC PROPERTIES; MONITORING; OPTICAL PROPERTIES; OPTICAL SENSORS; SOLAR CELLS;

DEPOSITION PROCESS; IN-LINE OPTICAL CHARACTERIZATION; OPTICAL SPECTROSCOPY;

COATINGS;

EID: 33344456186     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.263     Document Type: Conference Paper

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