Three-layer broad-band antireflective coating on web

Thin Solid Films

Volumn 351, Issue 1-2, 1999, Pages 212-215

  Ishikawa, Hiro ^a   Honjo, Yoshiharu ^a   Watanabe, Kazuo ^a  

^a SONY CORPORATION   (Japan)

Author keywords

Adhesion; Multilayer; Optical coating; Reflection specification; Resistivity; Silicon oxide; Titanium nitride

Indexed keywords

ANTIREFLECTION COATINGS; INDUSTRIAL APPLICATIONS; MULTILAYERS; OPTICAL PROPERTIES; QUALITY ASSURANCE; SILICA; SPECIFICATIONS; STRUCTURE (COMPOSITION); TITANIUM NITRIDE; WEAR RESISTANCE;

LUMINOUS REFLECTANCE; REFLECTION SPECIFICATION; THREE LAYER BROAD BAND ANTIREFLECTIVE COATING;

PLASTIC FILMS;

EID: 0033170223     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01792-1     Document Type: Article

References (4)

1. A.V.D. Voort, Optical Interference Coatings, Tech. Dig. Ser., 9 1998 p. 408.
2. Y. Oshima, M. Yamashita, Y. Honjo, T. Kobayshi, Proc. 15th Symp. Plasma Processing, Divison of Plasma Electronics, Society of Applied Physics, 21-23 January 1998, p. 442.
3. H. Ishikawa, B. Lippey, Proc. 10th Int. Conf. Vacuum Web Coating, Fort Lauderdale, FL, p. 221.
4. T. Oyama, Patent Int. Publication no. WO96/18917.