Impact of RCA treatment of glass substrates on the properties of polycrystalline silicon thin film transistors

Microelectronic Engineering

Volumn 45, Issue 4, 1999, Pages 299-310

  Awadelkarim, O O ^a   Wang, Y Z ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; DIFFUSION IN SOLIDS; GLASS; HOT CARRIERS; IMPURITIES; LIQUID CRYSTAL DISPLAYS; POLYCRYSTALLINE MATERIALS; SILICON; SUBSTRATES;

ACTIVE MATRIX LIQUID CRYSTAL DISPLAYS (AMLCD); POLYCRYSTALLINE SILICON;

THIN FILM TRANSISTORS;

EID: 0032667818     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00288-3     Document Type: Article

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