Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS

International Journal of Advanced Manufacturing Technology

Volumn 28, Issue 3-4, 2006, Pages 321-327

  Zhang, Wenming ^a   Meng, Guang ^a   Li, Hongguang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Adaptive vibration control; MEMS; Micro cantilever; PZT

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; COMPUTER SIMULATION; EQUATIONS OF MOTION; FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; VOLTAGE CONTROL;

ADAPTIVE VIBRATION CONTROL; MICRO-CANTILEVER BEAMS; PIEZOELECTRIC ACTUATORS (PZT);

VIBRATION CONTROL;

EID: 33644697494     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2363-5     Document Type: Article

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