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Applied Physics Letters

Volumn 94, Issue 6, 2009, Pages

Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis

(2) Banyay, Matus a Juschkin, Larissa a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; FILM PREPARATION; GADOLINIUM; LASER PULSES; OPTICAL INSTRUMENTS; REFLECTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; SILVER; SURFACES; ULTRATHIN FILMS; ULTRAVIOLET DEVICES;

ABSORPTION FINE STRUCTURES; CHARACTERISTIC ABSORPTIONS; DISCHARGE SOURCES; ELEMENTAL COMPOSITIONS; EXTREME ULTRAVIOLETS; GRAZING INCIDENCE ANGLES; NORMAL INCIDENCES; SENSITIVE ANALYSIS; TABLE TOPS; THIN-FILM ANALYSIS; ULTRATHIN FILM SYSTEMS; WAVELENGTH REGIONS; XUV MULTILAYER OPTICS;

SURFACE ANALYSIS;

EID: 60349112220 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3079394 Document Type: Article

Times cited : (27)

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