Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source

Review of Scientific Instruments

Volumn 76, Issue 4, 2005, Pages

  Bergmann, Klaus ^a   Rosier, Oliver ^a   Metzmacher, Christof ^b  

^a FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GRAZING INCIDENCE; PLASMA LIGHT SOURCE; ULTRAVIOLET REFLECTOMETERS;

BANDWIDTH; GAS DISCHARGE TUBES; LIGHT REFLECTION; LIGHT SOURCES; OPTICAL PUMPING; ROUGHNESS MEASUREMENT; SIGNAL DETECTION; SYNCHROTRON RADIATION;

ULTRAVIOLET DETECTORS;

EID: 17644368536     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1884387     Document Type: Article

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