Capacitive humidity-sensing properties of electron-beam-evaporated nanophased WO3 film on silicon nanoporous pillar array

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 41, Issue 4, 2009, Pages 711-714

  Dong, Yong Fen ^a   Li, Long Yu ^a   Jiang, Wei Fen ^a   Wang, Hai Yan ^a   Li, Xin Jian ^a  

^a ZHENGZHOU UNIVERSITY   (China)

Author keywords

Capacitive humidity sensor; Silicon nanoporous pillar array (Si NPA); WO3; WO3 Si NPA

Indexed keywords

ATMOSPHERIC HUMIDITY; HUMIDITY CONTROL; HUMIDITY SENSORS; METEOROLOGY; MOISTURE; SENSORS;

AVERAGE GRAIN SIZES; CAPACITIVE HUMIDITY SENSOR; ELECTRON-BEAM; HUMIDITY HYSTERESIS; INTERDIGITAL ELECTRODES; MEASURING FREQUENCIES; RECOVERY TIME; RELATIVE HUMIDITIES; SENSING MATERIALS; SENSING PROPERTIES; SI NANOSTRUCTURES; SILICON NANOPOROUS PILLAR ARRAY (SI-NPA); TRICLINIC PHASE; WO3; WO3/SI-NPA; X-RAY DIFFRACTION MEASUREMENTS;

SILICON;

EID: 60349094872     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2008.11.014     Document Type: Article

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