Electron paramagnetic resonance characterization of defects in Hf O2 and Zr O2 powders and films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 1, 2009, Pages 317-320

  Barklie, R C ^a   Wright, Sandra ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRAPPING; DEFECTS; ELECTRON RESONANCE; ELECTRON SPIN RESONANCE SPECTROSCOPY; HAFNIUM; HAFNIUM COMPOUNDS; MAGNETIC RESONANCE; PARAMAGNETIC MATERIALS; PARAMAGNETISM; POWDERS; QUANTUM THEORY; RESONANCE; SILICON OXIDES; SURFACE DEFECTS; ZIRCONIUM;

ANNEALED POWDERS; E-BEAM EVAPORATIONS; ELECTRON PARAMAGNETIC RESONANCES; EPR SPECTRUM; ION IRRADIATIONS; LOW ENERGIES; MONOCLINIC PHASE;

PARAMAGNETIC RESONANCE;

EID: 59949083713     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3025882     Document Type: Article

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