EPR study of defects in as-received, γ-irradiated and annealed monoclinic HfO2 powder

Microelectronic Engineering

Volumn 84, Issue 9-10, 2007, Pages 2378-2381

  Wright, Sandra ^a   Feeney, S ^a   Barklie, R C ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

irradiation; Annealing; Defects; EPR; HfO2

Indexed keywords

ANNEALING; GAMMA RAYS; HAFNIUM COMPOUNDS; IRRADIATION; MATHEMATICAL MODELS; PARAMAGNETIC RESONANCE;

MONOCLINIC POWDERS; PARAMAGNETIC CENTRES;

DEFECTS;

EID: 34248658545     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.007     Document Type: Article

References (15)

1. Wilk G.D., Wallace R.M., and Anthony J.M. J. Appl. Phys. 89 (2001) 5243
2. Robertson J. Rep. Progr. Phys. 69 (2006) 327
3. A.S. Foster, F.L. Gejo, A.L. Shluger and R.M. Nieminen, Physical Review B (Condensed Matter and Materials Physics) 65 (2002) 174117:1.
4. Xiong K., Robertson J., Gibson M.C., and Clark S.J. Appl. Phys. Lett. 87 (2005) 183505
5. Xiong K., and Robertson J. Microelectr. Eng. 80 (2005) 408
6. Feng Y.P., Lim A.T.L., and Li M.F. Appl. Phys. Lett. 87 (2005) 062105
7. A.Y. Kang, P.M. Lenahan, J. J. F. Conley and Y. Ono, IEEE Internat. Integ. Reliability Workshop (2003) 24.
8. Kang A.Y., Lenahan P.M., and Conley Jr. J.F. Appl. Phys. Lett. 83 (2003) 3407
9. Stesmans A., Afanas'ev V.V., Chen F., and Campbell S.A. Appl. Phys. Lett. 84 (2004) 4574
10. Wright S., and Barklie R.C. Mater. Sci. in Semicond. Proc. 9 (2006) 892
11. Liu H.W., Feng L.B., Zhang X.S., and Xue Q.J. J. Phys. Chem. 99 (1995) 332
12. Zhao Q., Wang X., and Cai T. Appl. Surf. Sci. 225 (2004) 7
13. Kumar C.P., Gopal N.O., Wang T.C., Wong M.S., and Ke S.C. J. Phys. Chem. B 110 (2006) 5223
14. D. Munoz Ramo, Private Communication.
15. D. Munoz Ramo, J.L. Gavartin and A.L. Shluge, Phys. Rev. B (2007) Accepted for publication.