Fabrication of microheater by laser micro cladding electronic paste

Materials Science and Engineering: B

Volumn 157, Issue 1-3, 2009, Pages 15-19

  Cai, Zhixiang ^a   Li, Xiangyou ^a   Hu, Qianwu ^a   Zeng, Xiaoyan ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Electronic paste; Laser micro cladding; Microheater; RuO2

Indexed keywords

ALUMINA; ALUMINUM OXIDE; FABRICATION; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; SUBSTRATES; THICK FILMS;

ALUMINA SUBSTRATES; DIRECT-WRITE TECHNIQUE; ELECTRONIC PASTES; HEATING MATERIALS; LASER MICRO CLADDING ELECTRONIC PASTES; LASER MICRO-CLADDING; MICROHEATER; RAPID MANUFACTURING; RAPID-PROTOTYPING; THICK FILM RESISTOR PASTES;

RUTHENIUM COMPOUNDS;

EID: 59649098238     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.11.050     Document Type: Article

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