Ceramic micro heater technology for gas sensors

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2006, Pages 197-200

  Moldovan, Carmen ^a   Nedelcu, Oana ^a   Johander, Per ^b   Goenaga, Igor ^c   Gomez, David ^c   Petkov, Petko ^d   Kaufmann, Ulrike ^e,f   Ritzhaupt Kleissl, Hans Joachim ^d   Dorey, Robert ^e,f   Persson, Katrin ^g  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b SWEREA IVF   (Sweden)

^c IK4 TEKNIKER   (Spain)

^d CARDIFF UNIVERSITY   (United Kingdom)

^e KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^f CRANFIELD UNIVERSITY   (United Kingdom)

^g Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

Gas sensor; Micro heaters

Indexed keywords

CERAMIC PRODUCTS; CHEMICAL SENSORS; CONDUCTIVE MATERIALS; ENERGY DISSIPATION; LASER APPLICATIONS; MILLING (MACHINING);

CERAMIC SUSPENDED MEMBRANES; LASER MILLING; MICROHEATERS;

HEATING EQUIPMENT;

EID: 43549089927     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2006.283967     Document Type: Conference Paper

References (8)