Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 12-17

  Wiche, G ^a   Berns, A ^a   Steffes, H ^a   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

MEMS; Micro hotplate; Silicon carbide; Temperature distribution

Indexed keywords

MICRO HOTPLATES; MICRO THERMOCOUPLES; SQUARE SHAPED MEMBRANES;

MEMBRANES; SILICON CARBIDE; SUBSTRATES; TEMPERATURE DISTRIBUTION; THERMOANALYSIS; THERMOCOUPLES;

SENSORS;

EID: 24944480261     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.028     Document Type: Conference Paper

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